Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization
Crossref DOI link: https://doi.org/10.1116/1.4868627
Published Online: 2014-03-17
Published Print: 2014-05-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Tut, Turgut
Dan, Yaping
Duane, Peter
Ye, Winnie N.
Degirmenci, Fatih
Yu, Young
Wober, Munib
Crozier, Kenneth B.