Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron
Crossref DOI link: https://doi.org/10.1116/1.4914174
Published Online: 2015-03-16
Published Print: 2015-05-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Meng, Liang
Yu, He
Sporre, John R.
Raman, Priya
Szott, Matthew M.
McLain, Jake T.
Ruzic, David N.