Kim, Hyun-su
Baksh, Peter
Odstrcil, Michal
Miszczak, Magdalena
Frey, Jeremy G.
Juschkin, Larissa
Brocklesby, William S.
Article Title: Lloyd’s mirror interference lithography with EUV radiation from a high-harmonic source
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-04-28
Date Accepted: 2016-05-25
Online publication date: 2016-06-09