Cremers, VĂ©ronique
Puurunen, Riikka L. http://orcid.org/0000-0001-8722-4864
Dendooven, Jolien http://orcid.org/0000-0002-2385-3693
Funding for this research was provided by:
SIM-Flanders
European Cooperation in Science and Technology (MP1402)
Tekes
Fonds Wetenschappelijk Onderzoek
Finnish Centre of Excellence in Atomic Layer Deposition