A new approach of electrochemical etching fabrication based on drop-off-delay control
Crossref DOI link: https://doi.org/10.1063/1.5094470
Published Online: 2019-07-17
Published Print: 2019-07-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Yang, Sheng
He, Weinan
Li, Can
Han, Yuexia
Gu, Ning
Funding for this research was provided by:
National Key Research and Development Program of China (2017YFA0104302)
National Natural Science Foundation of China (61420106012, 61821002)