Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
Crossref DOI link: https://doi.org/10.1116/1.4998940
Published Online: 2017-09-08
Published Print: 2017-09-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Greene, J. E.
Funding for this research was provided by:
None.