Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2 plasmas
Crossref DOI link: https://doi.org/10.1063/1.4765357
Published Online: 2012-11-06
Published Print: 2012-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Chung, T. H.
Ra Kang, Hae
Keun Bae, Min
