Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films
Crossref DOI link: https://doi.org/10.1116/1.4769725
Published Online: 2012-12-07
Published Print: 2013-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Schmidt, Susann
Czigány, Zsolt
Greczynski, Grzegorz
Jensen, Jens
Hultman, Lars
