Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Crossref DOI link: https://doi.org/10.1063/1.4765048
Published Online: 2012-12-10
Published Print: 2012-12-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Yong, Y. K.
Moheimani, S. O. R.
Kenton, B. J.
Leang, K. K.
Funding for this research was provided by:
National Science Foundation (CMMI 0910570)
National Science Foundation (DUE 0852756)
