Atomic layer deposition of zinc sulfide with Zn(TMHD)2
Crossref DOI link: https://doi.org/10.1116/1.4769862
Published Online: 2012-12-10
Published Print: 2013-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Short, Andrew
Jewell, Leila
Doshay, Sage
Church, Carena
Keiber, Trevor
Bridges, Frank
Carter, Sue
Alers, Glenn
