Three-dimensional micro electromechanical system piezoelectric ultrasound transducer
Crossref DOI link: https://doi.org/10.1063/1.4772469
Published Online: 2012-12-17
Published Print: 2012-12-17
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hajati, Arman
Latev, Dimitre
Gardner, Deane
Hajati, Azadeh
Imai, Darren
Torrey, Marc
Schoeppler, Martin
