Plasma-assisted cleaning by metastable-atom neutralization
Crossref DOI link: https://doi.org/10.1116/1.4770500
Published Online: 2012-12-26
Published Print: 2013-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Lytle, Wayne M.
Andruczyk, Daniel
Ruzic, David N.
