Laser produced plasma sources for nanolithography—Recent integrated simulation and benchmarking
Crossref DOI link: https://doi.org/10.1063/1.4807379
Published Online: 2013-05-21
Published Print: 2013-05-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hassanein, A.
Sizyuk, T.
