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Optical emission spectroscopy and Langmuir probe diagnostics of CH3F/O2 inductively coupled plasmas

Crossref DOI link: https://doi.org/10.1063/1.4807298

Published Online: 2013-06-03

Published Print: 2013-06-07

Update policy: https://doi.org/10.1063/aip-crossmark-policy-page

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