Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching
Crossref DOI link: https://doi.org/10.1063/1.4819321
Published Online: 2013-08-27
Published Print: 2013-08-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Ikutame, Naoki
Kawaguchi, Keiga
Ikeda, Hiroshi
Sakai, Daisuke
Harada, Kenji
Funatsu, Shiro
Nishii, Junji
