Design and implementation of a novel portable atomic layer deposition/chemical vapor deposition hybrid reactor
Crossref DOI link: https://doi.org/10.1063/1.4821081
Published Online: 2013-09-16
Published Print: 2013-09-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Selvaraj, Sathees Kannan
Jursich, Gregory
Takoudis, Christos G.
