Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier
Crossref DOI link: https://doi.org/10.1063/1.4827087
Published Online: 2013-11-04
Published Print: 2013-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Lee, Hak-Jun
Kim, Hyun-Chang
Kim, Hyo-Young
Gweon, Dae-Gab
