Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
Crossref DOI link: https://doi.org/10.1063/1.4858964
Published Online: 2013-12-30
Published Print: 2013-12-23
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hwang, Yoontae
Nguyen, Binh-Minh
Dayeh, Shadi A.
Funding for this research was provided by:
DOE (20110264ER)
