6H-SiC microdisk torsional resonators in a “smart-cut” technology
Crossref DOI link: https://doi.org/10.1063/1.4867866
Published Online: 2014-03-06
Published Print: 2014-03-03
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Yang, Rui
Wang, Zenghui
Lee, Jaesung
Ladhane, Kalyan
Young, Darrin J.
Feng, Philip X.-L.
