Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon
Crossref DOI link: https://doi.org/10.1063/1.4875928
Published Online: 2014-05-07
Published Print: 2014-05-05
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Jiao, L. S.
Moon, S. K.
Ng, E. Y. K.
Zheng, H. Y.
Son, H. S.
