Ion energy distributions in a pulsed dual frequency inductively coupled discharge of Ar/CF4 and effect of duty ratio
Crossref DOI link: https://doi.org/10.1063/1.4928442
Published Online: 2015-08-31
Published Print: 2015-08-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Mishra, Anurag
Seo, Jin Seok
Kim, Tae Hyung
Yeom, Geun Young
Funding for this research was provided by:
Ministry of Knowledge Economy, South Korea (10041926)
Ministry of Knowledge Economy, South Korea (N009300229)
