Enhanced adhesion of electron beam resist by grafted monolayer poly(methylmethacrylate-<i>co</i>-methacrylic acid) brush
Crossref DOI link: https://doi.org/10.1116/1.4935506
Published Online: 2015-11-12
Published Print: 2015-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Viscomi, Francesco Narda
Dey, Ripon Kumar
Caputo, Roberto
Cui, Bo
