Emmerich, F
Thielemann, C
Journal title: Nanotechnology
Article type: paper
Article title: Real-space measurement of potential distribution in PECVD ONO electrets by Kelvin probe force microscopy
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-28
Date accepted: 2016-02-29
Online publication date: 2016-04-07