Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
Crossref DOI link: https://doi.org/10.1116/1.4953029
Published Online: 2016-06-03
Published Print: 2016-07-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Broas, Mikael
Sippola, Perttu
Sajavaara, Timo
Vuorinen, Vesa
Pyymaki Perros, Alexander
Lipsanen, Harri
Paulasto-Kröckel, Mervi
