Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break
Crossref DOI link: https://doi.org/10.1116/1.4960648
Published Online: 2016-08-11
Published Print: 2016-09-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Piallat, Fabien
Gassilloud, Remy
Caubet, Pierre
Vallée, Christophe
