Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(<i>tert</i>-butylimido)bis(dimethylamido) molybdenum
Crossref DOI link: https://doi.org/10.1116/1.4972776
Published Online: 2016-12-23
Published Print: 2017-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Bertuch, Adam
Keller, Brent D.
Ferralis, Nicola
Grossman, Jeffrey C.
Sundaram, Ganesh
