Soft nanoimprint mold with rigid relief features for improved pattern transfer
Crossref DOI link: https://doi.org/10.1116/1.4972791
Published Online: 2016-12-23
Published Print: 2017-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Menahem, Liran
Schvartzman, Mark
Funding for this research was provided by:
Adelis Foundation (2021611)
Israel Science Foundation (1401/15)
