Shafir, G
Zolotukhin, D https://orcid.org/0000-0002-5206-9486
Godyak, V
Shlapakovski, A
Gleizer, S
Slutsker, Ya
Gad, R
Bernshtam, V
Ralchenko, Yu
Krasik, Ya E
Funding for this research was provided by:
PAZY (2020960)
Russian Foundation for Basic Research (16-38-00230)
DOE OFES (DE-SC0001939)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Characterization of inductively coupled plasma generated by a quadruple antenna
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-12
Date accepted: 2016-12-09
Online publication date: 2017-01-17