Maximizing stoichiometry control in reactive sputter deposition of TiO2
Crossref DOI link: https://doi.org/10.1116/1.4974140
Published Online: 2017-01-24
Published Print: 2017-03-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hoskins, Brian D.
Strukov, Dmitri B.
Funding for this research was provided by:
National Science Foundation (NSF-DMR 1121053)
Air Force Office of Scientific Research (FA9550-12-1-003)
