Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask
Crossref DOI link: https://doi.org/10.1116/1.4976524
Published Online: 2017-02-16
Published Print: 2017-03-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Fujii, Takuya
Okada, Takeru
Isoda, Taiga
Syazwan, Mohd Erman
Chentir, Mohamed-Tahar
Itoh, Kohei M.
Yamashita, Ichiro
Samukawa, Seiji
