Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation
Crossref DOI link: https://doi.org/10.1116/1.4980134
Published Online: 2017-04-11
Published Print: 2017-05-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hung, Yung-Jr
Chang, Han-Jung
Chang, Ping-Chien
Lin, Jia-Jin
Kao, Tzu-Chieh
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST105-2221-E-110-075)
