Interplay between deoxidation and dewetting for ultrathin SOI films
Crossref DOI link: https://doi.org/10.1063/1.4980132
Published Online: 2017-04-17
Published Print: 2017-04-17
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Trautmann, M.
Cheynis, F.
Leroy, F.
Curiotto, S. https://orcid.org/0000-0002-7332-0836
Müller, P. https://orcid.org/0000-0003-0911-1308
Funding for this research was provided by:
Agence Nationale de la Recherche (ANR-13-BS04-0004-02)
