Li, Gary Z
Matlock, Taylor S
Goebel, Dan M
Dodson, Christopher A
Matthes, Christopher S R
Ghoniem, Nasr M
Wirz, Richard E
Funding for this research was provided by:
Air Force Office of Scientific Research (FA2386-13-1-3018, FA9550-16-1-0444, FA9550-14-10317, FA9550-11-1-0282)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: In situplasma sputtering and angular distribution measurements for structured molybdenum surfaces
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-10-10
Date accepted: 2017-03-31
Online publication date: 2017-04-27