Trench formation and corner rounding in vertical GaN power devices
Crossref DOI link: https://doi.org/10.1063/1.4983558
Published Online: 2017-05-11
Published Print: 2017-05-08
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Zhang, Yuhao https://orcid.org/0000-0002-2849-5653
Sun, Min
Liu, Zhihong
Piedra, Daniel
Hu, Jie
Gao, Xiang
Palacios, Tomás
Funding for this research was provided by:
Advanced Research Projects Agency - Energy
Accepted Manuscript valid from 2018-05-11
