Park, Jin Woo
Kim, Doo San
Mun, Mu Kyeom
Lee, Won Oh
Kim, Ki Seok
Yeom, Geun Young
Funding for this research was provided by:
Ministry of Trade, Industry and Energy (10054882)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Atomic layer etching of InGaAs by controlled ion beam
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-01
Date accepted: 2017-05-03
Online publication date: 2017-06-06