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Effects of Al addition to Si-based flux on the growth of 4H-SiC films by vapour–liquid–solid pulsed laser deposition

Crossref DOI link: https://doi.org/10.1039/C7CE00945C

Published Online: 2017

Update policy: https://doi.org/10.1039/rsc_crossmark_policy

Authors

Yamaguchi, R.

Osumi, A.

Onuma, A.

Nakano, K.

Maruyama, S. https://orcid.org/0000-0002-6608-2219
Mitani, T.

Kato, T.

Okumura, H.

Matsumoto, Y. https://orcid.org/0000-0003-1819-5566
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CROSSCHECK

: This document is CrossCheck deposited

RELATED DATA

: Supplementary Information

IDENTIFIERS

: S. Maruyama (ORCID)

: Y. Matsumoto (ORCID)

: Y. Matsumoto (ResearcherID)

COPYRIGHT AND LICENSING

: The Royal Society of Chemistry has an exclusive publication licence for this journal

PUBLICATION HISTORY

: Received 18 May 2017; Accepted 27 July 2017; Advance Article published 4 August 2017; Version of Record published 11 September 2017