Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-<i>k</i> dielectrics
Crossref DOI link: https://doi.org/10.1116/1.5001573
Published Online: 2017-09-13
Published Print: 2017-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Li, Weiyi
Pei, Dongfei
Benjamin, Daniel
Chang, Jen-Yung
King, Sean W.
Lin, Qinghuang
Shohet, J. Leon
