<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:mn>12</mml:mn><mml:mtext>−</mml:mtext><mml:mi>μ</mml:mi><mml:mi mathvariant="normal">m</mml:mi></mml:mrow></mml:math> -Pitch Electromechanical Resonator for Thermal Sensing
Crossref DOI link: https://doi.org/10.1103/PhysRevApplied.9.024016
Published Online: 2018-02-15
Update policy: https://doi.org/10.1103/crossmark-policy
Laurent, Ludovic
Yon, Jean-Jacques
Moulet, Jean-Sébastien
Roukes, Michael
Duraffourg, Laurent
Funding for this research was provided by:
LETI Carnot Institute
Version of Record valid from 2018-02-15