Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Crossref DOI link: https://doi.org/10.1063/1.5022558
Published Online: 2018-03-27
Published Print: 2018-03-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Stumpf, F.
Abu Quba, A. A.
Singer, P.
Rumler, M.
Cherkashin, N. https://orcid.org/0000-0002-0322-0864
Schamm-Chardon, S. https://orcid.org/0000-0001-5534-8475
Cours, R.
Rommel, M. https://orcid.org/0000-0002-1141-3228
