Park, Jin Woo
Kim, Doo San
Lee, Won Oh
Kim, Ju Eun
Yeom, Geun Young https://orcid.org/0000-0001-6603-2193
Funding for this research was provided by:
Nano Material Technology Development Program through the National Research Foundation Korea (NRF), funded by the Ministry of Education, Science, and Technology (2016M3A7B4910429)
National Research Foundation of Korea (NRF) grant funded by the Korea government (2018R1A2A3074950)
Article Title: Atomic layer etching of chrome using ion beams
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2018 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-08-20
Date Accepted: 2018-11-30
Online publication date: 2018-12-28