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Modeling the Lateral Wet Oxidation of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" overflow="scroll"> <mml:msub> <mml:mtext>Al</mml:mtext> <mml:mi>x</mml:mi> </mml:msub> <mml:msub> <mml:mtext>Ga</mml:mtext> <mml:mrow> <mml:mn>1</mml:mn> <mml:mo>−</mml:mo> <mml:mi>x</mml:mi> </mml:mrow> </mml:msub> <mml:mtext>As</mml:mtext> </mml:math> into Arbitrary Mesa Geometries

Crossref DOI link: https://doi.org/10.1103/PhysRevApplied.11.044067

Published Online: 2019-04-22

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