Funding for this research was provided by:
Australia Research Council (DP180103275)
Scientific Research Funds of Huaqiao University (605-50Y19022)
Article Title: Deformation and removal of semiconductor and laser single crystals at extremely small scales
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2019-12-30
Date Accepted: 2020-02-26
Online publication date: 2020-03-16