Wang, Yuning
Nagasaka, Kumi
Mitarai, Takuya
Ohiso, Yoshitaka
Amemiya, Tomohiro
Nishiyama, Nobuhiko
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization
Japan Science and Technology Agency (JPMJAC1603)
Japan Society for the Promotion of Science (#16H06082)
Article Title: High-quality InP/SOI heterogeneous material integration by room temperature surface-activated bonding for hybrid photonic devices
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-01-18
Date Accepted: 2020-03-26
Online publication date: 2020-04-23