Crossmark

Toolbox for atomic layer deposition process development on high surface area powders

Crossref DOI link: https://doi.org/10.1063/5.0037844

Published Online: 2021-02-18

Published Print: 2021-02-01

Update policy: https://doi.org/10.1063/aip-crossmark-policy-page

Authors

Knemeyer, K. https://orcid.org/0000-0001-7980-9280
Baumgarten, R. https://orcid.org/0000-0003-1718-9797
Ingale, P. https://orcid.org/0000-0002-3535-4234
Naumann d’Alnoncourt, R. https://orcid.org/0000-0002-9946-4619
Driess, M. https://orcid.org/0000-0002-9873-4103
Rosowski, F.
Funding

Funding for this research was provided by:

Deutsche Forschungsgemeinschaft (EXC 2008 - 390540038)