Texture of Thin Films of Aluminum Nitride Produced by Magnetron Sputtering
Crossref DOI link: https://doi.org/10.29328/journal.ijpra.1001106
Published Online: 2025-01-29
Published Print: 2025-01-29
Update policy: https://doi.org/10.29328/crossmark-policy
Strunin Vladimir, Ivanovich
Baranova Larisa, Vasilievna https://orcid.org/0000-0001-9760-5169
Baisova Bibigul, Tulegenovna
