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Design, fabrication and on-the-die characterization of a MEMS tuning-fork gyroscope

Crossref DOI link: https://doi.org/10.1007/s41683-018-0030-6

Published Online: 2018-09-25

Published Print: 2018-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Reddy, Jayaprakash https://orcid.org/0000-0001-6540-141X
Pratap, Rudra
Funding

Funding for this research was provided by:

NPMASS (MPMA005)
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Text and Data Mining valid from 2018-09-25
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Article History

Received: 17 January 2018

Revised: 20 August 2018

Accepted: 19 September 2018

First Online: 25 September 2018