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Resist materials for proton beam writing: A review

Crossref DOI link: https://doi.org/10.1016/j.apsusc.2014.04.147

Published Print: 2014-08

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Authors

van Kan, J.A.

Malar, P.

Wang, Y.H.
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This article is maintained by: Elsevier

Article Title: Resist materials for proton beam writing: A review

Journal Title: Applied Surface Science

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.apsusc.2014.04.147

Content Type: article

Copyright: Copyright © 2014 Elsevier B.V. All rights reserved.