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Polydimethylsiloxane films engineered for smart nanostructures

Crossref DOI link: https://doi.org/10.1016/j.mee.2018.02.029

Published Print: 2018-07

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Authors

Töpper, Tino https://orcid.org/0000-0002-7351-4702
Osmani, Bekim

Müller, Bert
Funding

Funding for this research was provided by:

Swiss National Science Foundation (20B1-1_175197)

Swiss Nanoscience Institute
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Text and Data Mining valid from 2018-07-01

Text and Data Mining valid from 2018-07-01

Version of Record valid from 2018-04-11
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This article is maintained by: Elsevier

Article Title: Polydimethylsiloxane films engineered for smart nanostructures

Journal Title: Microelectronic Engineering

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2018.02.029

Content Type: article

Copyright: © 2018 The Authors. Published by Elsevier B.V.