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Geometry optimization of a Lorentz force, resonating MEMS magnetometer

Crossref DOI link: https://doi.org/10.1016/j.microrel.2014.02.020

Published Print: 2014-06

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Bagherinia, M.

Bruggi, M.

Corigliano, A.

Mariani, S.

Lasalandra, E.
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This article is maintained by: Elsevier

Article Title: Geometry optimization of a Lorentz force, resonating MEMS magnetometer

Journal Title: Microelectronics Reliability

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.microrel.2014.02.020

Content Type: article

Copyright: Copyright © 2014 Elsevier Ltd. All rights reserved.