Hortschitz, W.
Kainz, A.
Steiner, H.
Stifter, M.
Kohl, F.
Schalko, J.
Sauter, T.
Keplinger, F.
This article is maintained by: Elsevier
Article Title: MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution
Journal Title: Procedia Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.proeng.2014.11.282
Content Type: article
Copyright: Copyright © 2014 The Authors. Published by Elsevier Ltd.